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MsL
  • Auger Screw Pump, Jet Pump
  • Linear Servo Drive Gantry System(±5um)
  • Vision System & Height sensor
  • Calibration Systems

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Ultra-High Precision Dispenser
Ultra-High Precision Dispenser
Models MsL
Dimension 1,300×1,100×1,380mm
Weight 1500kg
Power Supply AC200V,3Phase,30A
Gantry Speed 1,500mm/s
X / Y Positional Accuracy - 3 sigma ±5μm
Working Area MAX:250×330mm/MIN:50×70mm
Vision Digital Camera
Height Sensor Laser Sensor
Robot type
  • Three dimensional dispensing and the ability to follow part topography
  • Excellent position accuracy & Repeatability ideal for micro electronics and miniaturization trends
  • Short settling time contributes competitive UPH
Non-stop Vision System
  • High Image Processing Speed results in reduced vision alignment and vision
  • Vision repeatability：±1μm
  • 0.01sec/point
  • Check the positions of each component and calibrate the dispensing position based on part location and features (calibrate by ±1um and θ correction)
Z-axis Non Stop Height Sensor
  • Non-contact laser sensor
  • Measure the warpage of the substrate in 1μm
  • Repeatability ± 1 μm
  • 0.01 sec/point
  • Needle height
Inspection Capability
  • Detect if wrong parts or substrate loaded
  • Detect parts presented in the wrong orientation
  • Inspect dispensing shape
  • Dispensing height
  • Bad Mark Detection
  • Dispense inspection and quality verification in pre-dispensing station
  • Electronic Scale measurement
  • Underfill flow rate inspection
Automatic Set-up and Calibration System
  • Establish machine off-sets automatically calibrating distance between pumps, laser height sensor, and camera
  • Look up camera for machine off-sets and nozzle inspection
  • Nozzle calibration
    → Calibration to correct the attachment needle position error
    → Inspect the needle bend
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